Model EM-30VPX is a small size(400mm x 200mm) evacuating probe station designed to measure device properties with a wide range of
temperature (77K~500K) in the vacuum.
The system consists of a high quality chamber and probing that are both cost effective and efficient Our innovative mini-size evacuating probe station design is easy to use,and provides a portable accessible test tool for small size
device designs (up to 50 mm) under controlled measurement circumstance.
Moreover, this portable system is also suited to facilitatea transfer of the measurement platform into an isolated system such as glove box.
- All-general-purpose system
- Multi-control factors environments
- Suitable for portable use at various circumstance
- Compatible with tablet-sized high-resolution in-situ imaging
|Temperature changeable chuck
|Sample Chuck Size
||77K ~ 500K (LN2)
Temp rate: +130℃/min
Temp rate: -12℃/min
Temp resolution: ±0.5℃
||200V DC, 150W
||10mm x 10mm x 10mm
||Vacuum & magnet
||Triaxial & SMA type